Wafer Flatness Detection with SinceVision Laser Displacement Sensor
Industry pain points and demands
In the semiconductor industry, wafer smoothness plays a crucial role in preventing thermal stress changes during the packaging process, which could negatively impact chip functionality. SinceVision’s high-precision SG5000 series laser displacement sensor addresses these stringent flatness requirements. By supporting specular reflection-type installation and enabling multi-point value assessment, it ensures precise measurement of wafer flatness, promoting optimal chip performance and manufacturing efficiency.
SinceVision Solution: SG5020/SG5025 Laser Displacement Sensors
01The SinceVision SG series laser displacement sensors offer a maximum sampling frequency of 590kHz, ideal for high-precision measurements in diverse applications, including semiconductor industries.
02Achieve static repetition accuracy as fine as 0.02μm, ensuring superior detection and flatness assessment capabilities for critical components.
03Equipped with bright automatic adjustment, the sensors adapt seamlessly to various detection environments, enhancing measurement stability and accuracy.
Camera Selection
| Model number | SG5020/SG5025 | ||
| Reference distance (CD) | 20mm | ||
| Measuring range | -3mm~3mm | ||
| Light source | Light source wavelength | 655nm | |
| Laser class | Class 2 | ||
| Laser output power | 5mW | ||
| Spot diameter (spot size) | Speck of light | Φ 45 microns | |
| Wide spot | 45 * 400 microns | ||
Repetition accuracy ① | 0.02 mu m | ||
| linearity | ±0.02% of F.S. | ||
| Temperature characteristic | 0.01% F.S./℃ | ||
| Sampling frequency (Hz) | 1/2/5/10/20/50 KHZ / 88/200/400/590 (optional 10 level) | ||
| Input/output | Communication port | One 100Base-TX/1000Base-T Ethernet interface, one RS232 | |
| Analog output | 1 analog output, support analog voltage and analog current switching | ||
| Encoder input | 1 group difference encoder | ||
| IO input | 14, support timing, zero, reset, laser control, formula switching and other functions | ||
| IO output | 16 channels, determine the status output | ||
| Storage temperature | -20 ~ 70℃ | ||
| Operating temperature | 0 ~ 50 ° C | ||
| Working humidity | 35% to 85% no condensation | ||
| EFT protection | Power port 2kV/5 or 100kHz, signal port 1kV/5 or 100kHz, in accordance with IEC 61000-4-4 standards | ||
| ESD protection | Contact discharge is 4kV and air discharge is 8kV, in line with IEC 61000-4-2 standards | ||
| Vibration | 10Gs (10-500Hz), compliant with IEC 68-2-6 Fc standard | ||
| Impact | 50Gs/3ms per axis, in accordance with IEC 68-2-27 Ea standard | ||
| IP level | IP67, in accordance with IEC 60529 standard | ||
| Size (mm) | 60*61*41 | ||
| Data cable (wiring) model | SCB-GICAM-HA2-3m/5m/10m | ||
| Weight (including cables) | 324g | ||