Chip Appearance Defect Detection with SinceVision 3D Laser Profiler
Industry pain points and demands
As chip sizes continue to shrink, achieving precision in chip quality is vital for maximizing product yield and performance. SinceVision's 3D Laser Profiler offers unparalleled accuracy for detecting minute defects, addressing the challenges posed by traditional manual inspection methods, which often suffer from slow detection speeds and low accuracy. By enhancing visual detection of chip appearance defects, manufacturers in the semiconductor sectors can significantly boost production efficiency, improve product quality, and cut down on labor costs.
SinceVision Solution: SR7050 3D Laser Profiler
01With SinceVision's SR7050 3D Laser Profiler, achieve an X-axis resolution of 3200 points and a Z-axis repetition accuracy of 0.2μm for unparalleled precision in defect detection within semiconductor applications.
02Detect appearance defect sag depths greater than 0.2mm, enabling manufacturers to maintain stringent quality standards for chip production and improve overall product performance.
03Combining high stability with advanced 2D gray image calculations, the SR7050 3D Laser Profiler offers a comprehensive and reliable solution for detecting minute appearance defects.
Effect display
Camera Selection
| Model number | SR7050 | |||
| Reference distance (CD) | 50mm | |||
| Measuring range | Z-axis height (FS) | 5 mm | ||
| X-axis width | Proximal end | 30mm | ||
| Reference distance | The 30.5 mm | |||
| Distal end | The 31.5 mm | |||
| Light source | Light source wavelength | 405nm blue light | ||
| Laser class | 2M | |||
| Laser output power | 10mW | |||
| Repetition accuracy | Z-axis (height) | 0.2 mu m | ||
| X-axis (width) | 2.5 mu m | |||
| linearity | Z-axis (height) | ±0.05% F.S. | ||
| Contour data interval | X-axis (width) | 10 microns | ||
| X-axis contour points | 3200 | |||
| Reflection Angle (°) | 45 | |||
| Scanning speed (Hz) | 2500 ~ 8000 | |||
| Foot inch (mm) | 160x98x48 | |||
| Weight (g) | 750 | |||
| Temperature characteristic | 0.02% F.S./℃ | |||
| Encoder input | Single-ended, differential coders are supported | |||
| Input/output | 1 100Base-TX/1000Base-T Ethernet interface | |||
| Operating temperature | 0～50℃ | |||
| Storage temperature | '-20～70℃ | |||
| Working humidity | 35% to 85% without condensation | |||
| ESD protection | Contact discharge 4kV, air discharge 8kV, in accordance with IEC 61000-4-2 standards | |||
| EFT protection | Power port 2kV/5 or 100kHz, signal port 1kV/5 or 100kHz, in accordance with IEC 61000-4-4 standards | |||
| Impact | 50Gs/3ms per axis, in accordance with IEC 68-2-27 Ea standard | |||
| Vibration | 10Gs (10-500Hz), compliant with IEC 68-2-6 Fc standard | |||
| degrees of protection provided by enclosure | IP67, in accordance with IEC 60529 standard | |||